Fourier transform method for measurement of thin film thickness by speckle interferometry

Optical Engineering

Volumn 42, Issue 6, 2003, Pages 1694-1698

  Karaaliog̃lu, Canan ^a   Skarlatos, Yani ^a  

^a BOGAZICI UNIVERSITY   (Turkey)

Author keywords

Fourier transforms; Speckle interferometry; Thin films

Indexed keywords

ALUMINUM; CAMERAS; CHARGE COUPLED DEVICES; FOURIER TRANSFORMS; LIGHT INTERFERENCE; SPECKLE; THICKNESS MEASUREMENT; THIN FILMS;

ELECTRONIC SPECKLE PATTERN INTERFEROMETRY; INTERFERENCE FRINGES; MICHELSON INTERFEROMETER;

INTERFEROMETRY;

EID: 0042699879     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1572498     Document Type: Article

References (14)

1. M. de Angelis, S. de Nicola, P. Ferraro, A. Finizio, and G. Pierattini, "A new approach to high accuracy measurement of the focal lengths of lenses using a digital Fourier transform," Opt. Commun. 136, 370-374 (1997).
2. M. de Angelis, S. de Nicola, P. Ferraro, A. Finizio, and G. Pierattini, "Liquid refractometer based on interferometric fringe projection," Opt. Commun. 175, 315-321 (2000).
3. G. S. Spagnolo, D. Ambrosini, D. Paoletti, and G. Accardo, "Fiber optic projected fringes for monitoring marble surface status," J. Cult. Heritage 1, 337-343 (2000).
4. G. S. Spagnolo, G. Guattari, C. Sapia, D. Ambrosini, D. Paoletti, and G. Accardo, "Contouring of artwork surface by fringe projection and FFT analysis," Opt. Lasers Eng. 33, 141-156 (2000).
5. G. S. Spagnolo, D. Ambrossini, and G. Guattari, "Electrooptic holography system and digital image processing for in situ analysis of microclimate variation on artworks," J. Opt. 28, 99-106 (1997).
6. L. C. Wu, F. D'Amelio, R. A. Fox, I. Polyakov, and N. G. Daunton, "Light microscopic image analysis system to quantify immunoreactive terminal area opposed to nerve cells," J. Neurosci. Methods 74, 89-96 (1997).
7. C. Quan, C. J. Tay, H. M. Shang, and P. J. Bryanston-Cross, "Contour measurement by fiber optic fringe projection and Fourier transform analysis," Opt. Commun. 118, 479-483 (1995).
8. M. Takeda, H. Ina, and S. Kobayashi, "Fourier transform method of fringe pattern analysis for computer based topography and interferometry," J. Opt. Soc. Am. A 72, 156-160 (1982).
9. M. Takeda and K. Mutoh, "Fourier transform profilometry for the automatic measurement of 3-D object shapes," Appl. Opt. 22, 3977-3982 (1983).
10. G. S. Spagnolo, D. Ambrosini, D. Paoletti, and R. Borghi, "High speed digital processing of electrooptic holography images for a quantitative analysis," J. Opt. 28, 118-124 (1997).
11. C. A. Hobson, J. T. Atkinson, and F. Lilley, "The application of digital filtering to phase recovery when surface contouring using fringe projection techniques," Opt. Lasers Eng. 27, 355-368 (1997).
12. Y. M. He, C. J. Tay, and H. M. Shang, "Deformation and profile measurement using the digital projection grating method," Opt. Lasers Eng. 30, 367-377 (1998).
13. S. De Nicola and P. Ferraro, "Fourier transform calibration method for phase retrieval of carrier coded fringe pattern," Opt. Commun. 151, 217-221 (1998).
14. S. Di Nicola and P. Ferraro, "Fourier transform method of fringe analysis for moiré interferometry," Pure Appl. Opt. 2, 228-233 (2000).