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Journal of Applied Physics

Volumn 77, Issue 10, 1995, Pages 5156-5159

Investigation of titanium silicide formation in Ti+Si reactions using infrared spectroscopy and x-ray diffraction

(4) Saenger, K L a Cabral Jr , C a Clevenger, L A a Roy, R A a

a IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042695912 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.359260 Document Type: Article

Times cited : (11)

References (11)

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2
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- Lee, J.-J.¹ Lee, C.-O.² Ernst, S.³

3
- 84996204049
- edited by H. Behrens and G. EbelFachinformationszentrum, KarlsruheNo. 5–5. This was calculated from d [formula omitted] where [formula omitted] where c is in nm and [formula omitted] (assumed to be <0.06) is the fractional O atom concentration
- (1979) Gases and Carbon in Metals: Thermodynamics, Kinetics, and Properties

4
- 0003777710
- edited by R. C. WeastCRC, Cleveland, OH
- (1987) Handbook of Physics and Chemistry

5
- 0038718355
- edited by D. E. GrayMcGraw-Hill, New York
- (1972) American Institute of Physics Handbook , pp. 6-152

6
- 0000131544
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- Nava, F.¹ Tu, K.N.² Thomas, O.³ Senateur, J.P.⁴ Madar, R.⁵ Borghesi, A.⁶ Guizzetti, G.⁷ Gottlieb, U.⁸ Laborde, O.⁹ Bisi, O.¹⁰

7
- 84950545065
- and 6–41. (Note: refractive index data are listed only for [formula omitted])
- Ref. 3 , pp. 6-7

8
- 0038022135
- (1992) Appl. Phys. Lett. , vol.61 , pp. 2700
- Lin, H.-N.¹ Stoner, R.J.² Maris, H.J.³ Harper, J.M.E.⁴ Cabral, C.⁵ Halbout, J.-M.⁶ Rubloff, G.W.⁷

9
- 84950568747
- to be published
- J. Vac. Sci. Technol.
- Cabral, C.¹ Roy, R.A.² Clevenger, L.A.³ Saenger, K.L.⁴

10
- 0026963020
- (1992) Jpn. J. Appl. Phys. , vol.31 , pp. L1746
- Hara, T.¹ Nomura, T.² Chen, S.C.³

11
- 21344481643
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 506
- Hara, T.¹ Nomura, T.² Mosley, R.C.³ Suzuki, H.⁴ Sone, K.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.