Ion beam photography in sol-gel NiO-SiO2 films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 209, Issue , 2003, Pages 335-339

  Canut, B ^a   Merlen, A ^a   Teodorescu, V ^b   Ghica, C ^b   Sandu, C S ^b   Ramos, S M M ^a   Bovier, C ^a   Espiau de la Maestre, R ^c   Broniatowski, A ^c   Bernas, H ^c  

^a UNIVERSITÉ LYON 1   (France)

^b NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

^c 91405 Orsay Campus   (France)

Author keywords

Irradiation; Nanoclusters; Nickel; NiO; SiO2; Sol gel

Indexed keywords

ANNEALING; ARGON; COATING TECHNIQUES; COMPOSITE MATERIALS; ION BEAMS; LOW TEMPERATURE EFFECTS; MULTILAYERS; NANOSTRUCTURED MATERIALS; NITROGEN OXIDES; NUCLEATION; SILICA; SILICON WAFERS; SOL-GELS; STOICHIOMETRY; TRANSMISSION ELECTRON MICROSCOPY;

ION BEAM PHOTOGRAPHY;

SEMICONDUCTING FILMS;

EID: 0042661049     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)02018-9     Document Type: Conference Paper

References (13)

1. Dormann J.L. Revue Phys. Appl. 16:1981;275.
2. Berkowitz A., Young A.P., Mitchell J.R., Zang S., Carey M.J., Spada F.E., Parker F.T., Hutten A., Thomas G. Phys. Rev. Lett. 68:1992;3745.
3. Zanghi D., Teodorescu C.M., Petroff F., Fisher H., Bellouard C., Clerc C., Pelissier C., Traverse A. J. Appl. Phys. 90(12):2001;6367.
4. Mazzoldi P., Arnold G.W., Battaglin G., Bertoncello R., Gonella F. Nucl. Instr. and Meth. B. 91:1994;478.
5. Hayashi R., Yamamoto M., Tsunetomo K., Kohno K., Osaka Y., Nasu H. Jpn. J. Appl. Phys., Part 1. 29:1990;756.
6. Pereira C.A.M., Abbate M., Schreiner W.H., Boff M.A.S., Teixeira S.R., Schmidt J.E. Solid State Commun. 116:2000;457.
7. Feltin N., Levy L., Ingert D., Vincent E., Pileni M.P. J. Appl. Phys. 87:2000;1415.
8. Lutz T., Estournès C., Guille J.L. J. Sol-Gel Sci. Technol. 13:1998;929.
9. Rodeghiero E.D., Tse O.K., Chisaki J., Giannelis E.P. Mat. Sci. Eng. A. 195:1995;151.
10. Santos A., Ardisson J.D., Tambourgi E.B., Macedo W.A.A. J. Magn. Magn. Mater. 177-181:1998;247.
11. Valentin E., Bernas H., Ricolleau C., Creuzet F. Phys. Rev. Lett. 86(1):2001;99.
12. Ziegler J.F., Biersack J.P., Littmark U. Stopping Power and Ranges of ions in matter. I:1985;Pergamon Press, New York.
13. Chatelon J.P., Terrier C., Roger J.A. Semicond. Sci. Technol. 14:1999;642.