Synthesis of boron nitride films prepared by photon- and ion-assisted deposition

Diamond and Related Materials

Volumn 5, Issue 9, 1996, Pages 883-887

  Rauschenbach, Bernd ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

Photon and ion beam assisted deposition; Structure characterization; Thin cubic boron nitride film; UV light irradiation

Indexed keywords

EID: 0042639086     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00440-8     Document Type: Article

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