Silicon active optical sensors: From functional photodetectors to smart sensors

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 359-364

  Malik, Alexander ^a   Martins, Rodrigo ^a  

^a Center of Excellence in Microelectronics Optoelectronics and Processes   (Portugal)

Author keywords

Functional photodetectors; Silicon; SIS heterostructures

Indexed keywords

ETCHING; FABRICATION; HETEROJUNCTIONS; OPTICAL SENSORS; PHOTODETECTORS; SILICON WAFERS;

FUNCTIONAL PHOTODETECTORS; PHOTOCURRENT;

SILICON SENSORS;

EID: 0042638115     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00068-5     Document Type: Article

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