A dedicated micromachining technology for high-aspect-ratio millimetre-wave circuits

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 435-441

  Saint Etienne, E ^a   Pons, P ^a   Blasquez, G ^a   Temple, P ^a   Conedera, V ^a   Dilhan, M ^a   Chauffleur, X ^a   Menini, Ph ^a   Plana, Robert ^a   Parra, Thierry ^a   Guillon, Bertrand ^a   Lalaurie, Jean Claude ^b  

^a LAAS CNRS   (France)

^b CNES   (France)

Author keywords

Dielectric membranes; Low losses; Micromachining; Millimetre wave passive circuits; Photoresist mould

Indexed keywords

BANDPASS FILTERS; DIELECTRIC FILMS; MICROMACHINING; MILLIMETER WAVE DEVICES; PHOTORESISTS; SILICON; SUBSTRATES;

COPLANAR TRANSMISSION LINE; DIELECTRIC MEMBRANE; MILLIMETER WAVE PASSIVE CIRCUIT;

PASSIVE NETWORKS;

EID: 0042638105     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00073-9     Document Type: Article

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