High-frequency properties of SrTiO3 thin-film capacitors fabricated on polymer-coated alloy substrates

Applied Physics Letters

Volumn 72, Issue 2, 1998, Pages 261-263

  Sugii, Nobuyuki ^a   Yamada, Hiroji ^a   Kagaya, Osamu ^a   Yamasaki, Matsuo ^a   Sekine, Kenji ^a   Yamashita, Kiichi ^a   Watanabe, Mitsuhiro ^b   Murakami, Shirou ^b  

^a HITACHI LTD   (Japan)

^b HITACHI CABLE LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042620574     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120704     Document Type: Article

References (4)

1. T. Matsui, M. Ouchida, H. Sugimoto, and T. Takahama, Technical Report of the Institute of Electronics, Information and Communication Engineers No. CPM92-97 (1992) (in Japanese).
2. K. Chen, M. Nielsen, S. Soss, E. J. Rymaszewski, T-M Lu, and C. T. Wan, IEEE Trans. Compon., Packag. Manuf. Technol., Part B 20, 117 (1997).
3. M. Shibuya, M. Nishitsuji, M. Kitagawa, T. Kamada, S. Hayashi, A. Tamura, and T. Hirao, Jpn. J. Appl. Phys., Part 1 32, L1830 (1993).
4. N. Sugii and K. Takagi, Thin Solid Films (to be published).