Invited - Microfabrication of 3D terahertz circuitry

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2003, Pages 739-742

  Mann, Chris M ^a,b   De Maagt, Peter ^c   McBride, Geoff ^d   Van de Water, Frank ^d   Castiglione, Dario ^d   McCalden, Alec ^d   Deias, Luisa ^d   Neill, James O ^d   Laisne, Alexandre ^d   Vallinas, Jorge Teniente ^d   Ederra, Inigo ^d   Haskett, David ^d   Jenkins, Derek ^d   Zinn, Alfred ^d   Ferlet, Marc ^d   Edeson, Ruben ^d  

^a Flann Microwave Ltd   (United Kingdom)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

^c EUROPEAN SPACE AGENCY   (Netherlands)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; INTEGRATED CIRCUIT LAYOUT; LOGIC DESIGN; MICROMACHINING; REACTIVE ION ETCHING; SILICON;

PHOTONIC BANDGAP;

OPTICAL WAVEGUIDES;

EID: 0042594462     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. T. W. Crowe, P. J. Koh, W. L. Bishop, C. M. Mann, J. L. Hesler, R. M. Weikle, P. A. Wood, D. N. Matheson, Inexpensive Receiver Components for Millimetre and Submillimetre Wavelengths, 8th International Symp. on Space THz Technol., Harvard University, March 1997.
2. www.virginiasemi.com
3. www.stsystems.com
4. R. Gonzalo, B. Martínez, C.M. Mann, H. Pellemans, P. Haring Bolivar and P. de Maagt. "A low cost Fabrication Technique for Symmetrical and Asymmetrical Layer by Layer Photonic Crystal at submillimeter-Wave Frequencies" IEEE Transactions on Microwave Theory and Techniques, Vol. 50, No 10, Oct 2002, pp. 2384-2392