The morphologies and the chemical states of the multiple zincating deposits on Al pads of Si chips

Thin Solid Films

Volumn 288, Issue 1-2, 1996, Pages 36-40

  Lin, Kwang Lung ^a   Chang, Shiuh Yuan ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Aluminium; Deposition process; Surface morphology; Zinc

Indexed keywords

ALUMINUM; ETCHING; MORPHOLOGY; NITRIC ACID; OXIDATION; SPUTTER DEPOSITION; SURFACES; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC;

ACIDIC ETCHING; ALUMINUM PADS; CHEMICAL STATES; CONTINUOUS FILMS; SILICON CHIPS; ZINCATING;

SILICON WAFERS;

EID: 0042594279     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08790-1     Document Type: Article

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