Vacuum evaporation of thin alumina layers

Thin Solid Films

Volumn 289, Issue 1-2, 1996, Pages 295-299

  Matolin, V ^a   Nehasil, V ^a   Bideux, L ^b   Robert, C ^b   Gruzza, B ^b  

^a CHARLES UNIVERSITY   (Czech Republic)

^b UNIVERSITÉ CLERMONT AUVERGNE   (France)

Author keywords

Aluminium oxide; Auger electron spectroscopy (AES); Evaporation

Indexed keywords

ALUMINA; ATOMS; AUGER ELECTRON SPECTROSCOPY; DISSOCIATION; EVAPORATION; FILM PREPARATION; MOLECULES; STOICHIOMETRY; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITION;

KNUDSEN CELL; VACUUM EVAPORATION;

THIN FILMS;

EID: 0042594155     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08895-5     Document Type: Article

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