Fabrication and characterization of waveguide structures on SOI

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4944, Issue , 2002, Pages 183-194

  Aalto, Timo ^a   Heimala, Päivi ^a   Yliniemi, Sanna ^a,b   Kapulainen, Markku ^a   Leppihalme, Matti ^a,b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

Photonic integrated circuit; Polarization; Silicon on insulator; SOI; Thermo optical switch; Waveguide

Indexed keywords

CLADDING (COATING); LIGHT POLARIZATION; OPTICAL DESIGN; SILICON ON INSULATOR TECHNOLOGY; SWITCHING;

PHOTONIC CRYSTAL WAVEGUIDES; PHOTONIC INTEGRATED CIRCUITS; THERMOOPTICAL SWITCHING;

OPTICAL WAVEGUIDES;

EID: 0042564600     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.477283     Document Type: Conference Paper

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