Microfabrication services at INO

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4979, Issue , 2003, Pages 353-363

  Alain, Christine ^a   Jerominek, Hubert ^a   Topart, Patrice ^a   Pope, Timothy D ^a   Picard, Francis ^a   Cayer, Félix ^a   Larouche, Carl ^a   Leclair, Sébastien ^a   Tremblay, Bruno ^a  

^a INO   (Canada)

Author keywords

Bulk and surface micromachining; IR bolometers; MEMS foundry; Microelectroforming; Micromirrors; Microphotonic; Thick resist; Wafer level packaging

Indexed keywords

BOLOMETERS; COMPUTER SIMULATION; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; PHOTOLITHOGRAPHY;

MICROELECTROMECHANICAL SYSTEMS; MICROFABRICATION SERVICES; MICROMIRRORS; MIROELECTROFORMING;

MICROMACHINING;

EID: 0042563405     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472738     Document Type: Conference Paper

References (5)

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3. T. D. Pope et al, "Commercial and Custom 160 × 120, 256 × 1, and 512 × 3 Pixel Bolometric FPAs", Proceedings of SPIE, 4721, pp. 64-74, 2002.
4. K. E. Petersen, "Silicon as a Mechanical Material", Proceedings of the IEEE, 70, No. 5, pp. 420-457, 1982.
5. F. Picard et al, "Nonimaging applications for microbolometer arrays", Proceedings of SPIE, 4369, pp. 274-286, 2001.