An overview of corrosion-wear interaction for planarizing metallic thin films

Wear

Volumn 255, Issue 7-12, 2003, Pages 869-874

  Ziomek Moroz, M ^a   Miller, A ^b   Hawk, J ^a   Cadien, K ^b   Li, D Y ^c  

^a NATIONAL ENERGY TECHNOLOGY LABORATORY   (United States)

^b INTEL CORPORATION   (United States)

^c UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Chemical mechanical planarization; Corrosion wear interaction; Metallic thin films

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CORROSION RESISTANCE; METALLIC FILMS; RELIABILITY; TRIBOLOGY; WEAR OF MATERIALS;

SYNERGISTIC EFFECTS;

THIN FILMS;

CORROSION; FILM; METALLIC COATING; SEMICONDUCTOR; WEAR;

EID: 0042522483     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(03)00225-4     Document Type: Article

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