Optimal design of an electrostatically actuated micro-beam for maximum pull-in voltage

Collection of Technical Papers - AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference

Volumn 3, Issue , 2003, Pages 2100-2106

  Abdalla, Mostafa M ^a   Reddy, Chevva K ^a   Faris, Waleed F ^a   Gürdal, Zafer ^a  

^a State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BOUNDARY CONDITIONS; CAPACITANCE; ELECTRIC POTENTIAL; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROACTUATORS; OPTIMIZATION; THICKNESS MEASUREMENT;

MAXIMUM PULL-IN VOLTAGE; MICROBEAM; NONLINEAR VOLTAGE DISPLACEMENT; OPTIMAL THICKNESS DISTRIBUTION;

MICROELECTROMECHANICAL DEVICES;

EID: 0042512246     PISSN: 02734508     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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