Degradation of polyimide by implantation with Ar+ ions

Journal of Applied Polymer Science

Volumn 64, Issue 4, 1997, Pages 723-728

  Svorcik V ^a   Rybka, V ^a   Hnatowicz, V ^b   Micek I ^a   Jankovskij, O ^a   Ochsner R ^c   Ryssel, H ^c  

^a INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

^b INSTITUTE OF MATHEMATICS   (Czech Republic)

^c Fraunhofer Inst F Intergrierte S   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHARGE TRANSFER; DEGRADATION; ELECTRIC CONDUCTIVITY OF SOLIDS; ION BOMBARDMENT; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING POLYMERS; SURFACE STRUCTURE; SURFACE TREATMENT; THERMAL EFFECTS; THERMOELECTRICITY;

SHEET RESISTIVITY; SURFACE POLARITY;

POLYIMIDES;

EID: 0042509335     PISSN: 00218995     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1097-4628(19970425)64:4<723::aid-app12>3.0.co;2-v     Document Type: Article

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