The role of polymer deposited in differential dielectric etch

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 1092-1095

  Fang, S ^a   Chiang, C ^a   Fraser, D ^a   Lee, B ^b   Keswick, P ^b   Chang, M ^b   Fung, K ^b  

^a INTEL CORPORATION   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042485241     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580274     Document Type: Article

References (10)

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