Synthesis and Evaluation of Copolymers of (Tert - Butoxy Car Bony Loxy) Sty r Ene and (2-Nitrobenzyl)Styrene Sulfonates: Single-Component Chemically Amplified Deep-UV Imaging Materials

Chemistry of Materials

Volumn 4, Issue 4, 1992, Pages 837-842

  Hanson, J E ^a   Reichmanis, E ^a   Houlihan, F M ^a   Neenan, T X ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042467607     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm00022a018     Document Type: Article

References (24)

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