Local composition analysis of SiC microstructures formed by ion projection in silicon using energy filtered TEM in combination with FIB specimen preparation

Materials Science and Engineering: B

Volumn 102, Issue 1-3, 2003, Pages 70-74

  Lindner, J K N ^a   Kubsky, S ^b   Schertel, A ^c  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b SORBONNE UNIVERSITÉ   (France)

^c FEI Deutschland GmbH   (Germany)

Author keywords

EFTEM; Focused ion beam; Ion beam projection; Ion beam synthesis; Microstructures; SiC

Indexed keywords

ABSORPTION; AMORPHOUS MATERIALS; COMPOSITION; ION BEAMS; MICROSTRUCTURE; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

ION BEAM SYNTHESIS;

SILICON CARBIDE;

EID: 0042431981     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00631-1     Document Type: Conference Paper

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