Determining the properties of pulsed laser deposited thin films by controlling the kinetic energy of the film-forming particles

Applied Physics A: Materials Science and Processing

Volumn 69, Issue 7, 1999, Pages

  Gottmann, J ^a   Schlaghecken, G ^a   Kreutz, E W ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042430778     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390051484     Document Type: Article

References (14)

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2. D.B. Chrisey, G.K. Hubler (Eds.): Pulsed Laser Deposition of Thin Films (Wiley, New York 1994)
3. A. Catherinot, B. Angleraud, J. Auberton, C. Champaux, C. Germain, C. Girault: Surface Treatment and Film Deposition (NATO ASI 1994)
4. E.W. Kreutz, J. Gottmann: Phys. Status Solidi A 166, 569 (1998)
5. E.W. Kreutz, M. Aden, M. Alunovic, A. Voss: Surf. Coat. Technol. 68/69, 344 (1994)
6. D.B. Geohegan: Pulsed Laser Deposition of Thin Films, ed. by D.B. Chrisey, G.K. Hubler (Wiley, New York 1994)
7. J. Gottmann, E.W. Kreutz: 6th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen (1998),
8. Surf. Coat. Technol. 116-119, 1128 (1999)
9. H.G. Tompkins: A Users's Guide to Ellipsometry (Academic Press, San Diego, CA 1993)
10. J. Gonzalo, C.N. Afonso, I. Madanaga: J. Appl. Phys. 81, 951 (1997)
11. D.B. Geohegan: in Excimer Lasers, ed. by L.D. Laude (Kluwer, Dordtrecht 1994) p. 165
12. J. Gottmann, T. Klotzbücher, E.W. Kreutz: ALT'97 International Conference on Laser Surface Processing, ed. by V.I. Pustovoy, Proc. SPIE 3404, 8 (1998)
13. J. Gottmann, E.W. Kreutz: Appl. Phys. A, accepted
14. J. Gottmann, A. Husmann, T. Klotzbücher, E.W. Kreutz: Surf. Coat. Technol. 100/101, 415 (1998)