GIANT REDUCTION IN LATERAL THERMAL CONDUCTIVITY OF THIN NITRIDE/SILICON/OXIDE MEMBRANE MEASURED WITH A SUSPENDED MICRO STRUCTURE

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1996-U, Issue , 1996, Pages 93-98

  Zheng, X Y ^a   Li, S Z ^a   Chen, M ^a   Wang, K L ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EQUIVALENT CIRCUITS; MEMBRANES; MICROSTRUCTURE; MONOCRYSTALLINE SILICON; SILICON NITRIDE;

% REDUCTIONS; ACCURATE MEASUREMENT; DIRECT MEASUREMENT; MEASUREMENTS OF; MEMBRANE MATERIAL; MICRO-STRUCTURES; MULTILAYER MEMBRANES; OXIDE MEMBRANE; THERMAL BRIDGE; THERMAL ELEMENTS;

SILICON OXIDES;

EID: 0042428126     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1996-1341     Document Type: Conference Paper

References (5)

1. M. I. Flik, B. I. Choi, and K. E. Goodson, 1992, “Heat Transfer Regimes in Microstructures,” ASME Journal of Heat Transfer, Vol. 114, pp. 666-674
2. C. L. Tien, and G. Chen, 1992, “Challenges in Microscale conductive and Radiative Heat Transfer,” ASME Journal of Heat Transfer, Vol. 116, pp. 799-807
3. A. Majumdar, 1991, “Microscale Heat Conduction in Dielectric Thin Films,” ASME Journal of Heat transfer, vol. 113, pp. 797-807
4. K. E. Goodson, M. I. Flik, L. T. Su, and D. A. Antoniadis, 1995, “Prediction and Measurement of Temperature Fields in Silicon-on-Insulator Electronic Circuits,” ASME Journal of Heat transfer, vol. 117, pp. 574-581
5. G. Chen, and C. L. Tien, 1993, “Thermal Conductivities of Quantum Structures,” Journal of Thermophysics and Heat Transfer, Vol. 7,pp. 311-318