Nanochemistry and structure of Zr and Hf based high dielectric constant films

Microscopy and Microanalysis

Volumn 9, Issue SUPPL. 2, 2003, Pages 466-467

  Floyd, M ^a   Carpenter, R W ^a   Dey, S K ^a   Marcus, S ^b   De Waard, H ^b   Werkhoven, C ^b  

^a Arizona State University   (United States)

^b ASM AMERICA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042423458     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/s1431927603442335     Document Type: Conference Paper

References (4)

1. S. K. Dey et al., J. Appl. Phys. in press(2003).
2. M. J. Kim and R. W. Carpenter, J. Mater. Res. 5 (1990) 347.
3. M. Catalano et al., J. Mater. Res. 8 ((1993) 2893.
4. C. C. Ahn, et al., EELS Atlas, ASU HREM Facility and Gatan, Inc.(1983).