2D analysis of gate polydepletion in ultra short MOSFETs

European Solid-State Device Research Conference

Volumn , Issue , 2001, Pages 207-210

  Josse, E ^a   Skotnicki, T ^a  

^a STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

2D ANALYSIS; MOSFETS; POLY-DEPLETION;

EID: 0042394513     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2001.195237     Document Type: Conference Paper

References (5)

1. Y.Taur at al., IEDM 1998, pp.789-792
2. T.Skotnicki, ESSDERC 2000, pp.19-33
3. E.Josse et al., IEDM 1999, pp.635-63
4. E.Josse et al., ESSDERC 2000, pp.548-551
5. K.DeMeyer et al., ESSDERC 1998, pp.63-68