Development of deep gratings for wavelength dispersion applications

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 6 A, 2003, Pages 3434-3437

  Yu, Wanji ^a   Oshita, Yoshinori ^a   Toyota, Hiroshi ^a   Konishi, Tsuyoshi ^b   Yotsuya, Tsutom ^a   Ichioka, Yoshiki ^c  

^a OSAKA SCIENCE AND TECHNOLOGY CENTER   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c NARA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

Deep grating; Diffraction efficiency; Microfabrication technology; Wavelength dispersion

Indexed keywords

OPTICAL PROPERTIES; OPTIMIZATION; REACTIVE ION ETCHING; SYNTHESIS (CHEMICAL);

DEEP GRATINGS; MICROFABRICATION TECHNOLOGY; ULTRAHIGH SPATIAL FREQUENCIES; WAVELENGTH DISPERSION APPLICATIONS;

DIFFRACTION GRATINGS;

EID: 0042381802     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.3434     Document Type: Article

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