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Volumn 36, Issue 1-6 SPEC., 2003, Pages 639-642
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Modification of PADC through electron-target collision
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Author keywords
2 MeV electrons; Bremsstrahlung emission; Bulk etch rate; Energy loss; Metal targets; Polyallyldiglycol carbonate
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Indexed keywords
CARBONATES;
COMPOSITION;
ELECTRONS;
ETCHING;
ELECTRON-TARGET COLLISION;
ELECTRON BEAMS;
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EID: 0042363602
PISSN: 13504487
EISSN: None
Source Type: Journal
DOI: 10.1016/S1350-4487(03)00216-6 Document Type: Conference Paper |
Times cited : (2)
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References (6)
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