Impedance measurements at rf plasmas in noble gases by use of the four-terminal network formalism

Review of Scientific Instruments

Volumn 63, Issue 4, 1992, Pages 2584-2586

  Wust K ^a   Groh, K H ^a   Lob H W ^a  

^a JUSTUS LIEBIG UNIVERSITY   (Germany)

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[No Author keywords available]

Indexed keywords

EID: 0042349727     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1142897     Document Type: Article

References (7)