Structure of nanoparticles of aluminum and silicon nitrides produced by RF plasma

Surface Review and Letters

Volumn 10, Issue 2-3, 2003, Pages 435-442

  Sato, Takeshi ^a   Kaito, Chihiro ^a   Saito, Yoshio ^b  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

AlN particle; Electron microscopy; Si3N4 particle

Indexed keywords

ALUMINUM NITRIDE; CRYSTAL STRUCTURE; NANOSTRUCTURED MATERIALS; PARTICLE SIZE ANALYSIS; PLASMAS; SMOKE;

RADIO FREQUENCY PLASMA;

SILICON NITRIDE;

ALUMINUM; ARGON; NITROGEN; SILICON NITRIDE;

CONFERENCE PAPER; CRYSTAL STRUCTURE; ELECTRON MICROSCOPY; EVAPORATION; NANOPARTICLE;

EID: 0042346239     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0218625x03005293     Document Type: Conference Paper

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