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Volumn 174-175, Issue , 2003, Pages 770-773
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Deposition technology of a new nanostructured material for reversible charge storage
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Author keywords
AFM; Carbon; Germanium; Nanostructure; PACVD
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
THIN FILMS;
REVERSIBLE CHARGE STORAGE EFFECT;
NANOSTRUCTURED MATERIALS;
COATING;
INDUSTRIAL APPLICATION;
PLASMA;
SURFACE PROPERTY;
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EID: 0042328069
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(03)00570-X Document Type: Article |
Times cited : (8)
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References (15)
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