Integration of ceramics research with the development of a microsystem

Journal of the American Ceramic Society

Volumn 86, Issue 7, 2003, Pages 1217-1219

  Saravanan, Rajgopal Arunachalam ^a   Liew, Li Anne ^a   Bright, Victor M ^a   Raj, Rishi ^a  

^a University of Colorado at Boulder   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; SILICON COMPOUNDS;

MICROSYSTEMS;

MATERIALS SCIENCE;

EID: 0042307293     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2003.tb03453.x     Document Type: Article

References (11)

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9. L.-A. Liew, "Polymer-Derived Silicon Carbonitride as a New Technology for Microelectromechanical Systems"; Ch. 6 in Ph.D. Thesis. Department of Mechanical Engineering, University of Colorado at Boulder, Boulder, CO, Aug. 22, 2002.
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