Fabrication of subwavelength, binary, antireflection surface-relief structures in the near infrared

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4096-4099

  Wendt, J R ^a   Vawter, G A ^a   Smith, R E ^a   Warren, M E ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042296959     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588598     Document Type: Article

References (13)

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