Interfacial reactions between Ti thin films and inp

Materials Science and Engineering B

Volumn 41, Issue 2, 1996, Pages 289-293

  Wang, D ^a   Ivey, D G ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

InP; Multicomnonent metallizations; Ti thin films

Indexed keywords

ANNEALING; DECOMPOSITION; REACTION KINETICS; SEMICONDUCTING INDIUM PHOSPHIDE; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; TITANIUM;

MULTICOMPONENT METALLIZATIONS;

INTERFACES (MATERIALS);

EID: 0042264124     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01666-2     Document Type: Article

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