Reference pads for miniature integrated optical sensors

Sensors and Actuators, B: Chemical

Volumn 38, Issue 1-3, 1997, Pages 116-121

  Dübendorfer, Jürg ^a   Kunz, Rino E ^a,b,c,d  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b ETH ZURICH   (Switzerland)

^c IBM ALMADEN RESEARCH CENTER   (United States)

^d Central R and D Optics Group   (Switzerland)

Author keywords

Evanescent wave sensors; Integrated optical sensors; Referencing; Replicated integrated optical sensors; Temperature effect

Indexed keywords

CHEMICAL SENSORS; FUSED SILICA; INTEGRATED OPTICS; POLYCARBONATES; SUBSTRATES; THERMAL EFFECTS; TITANIUM DIOXIDE;

EVANESCENT WAVE SENSORS; INTEGRATED OPTICAL SENSORS; ON CHIP REFERENCING;

OPTICAL SENSORS;

EID: 0042263904     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80180-3     Document Type: Article

References (23)

1. R.E. Kunz, Totally integrated optical measuring sensors, Proc. SPIE, Vol. 1587, 1992, pp. 98-113.
2. R.Th. Kersten, Integrated optics for sensors, in J. Dakin and B. Culshaw (eds.), Optical Fiber Sensors, Vol. 1: Principles and Components, Artech House, Boston, 1988, Ch. 9.
3. K. Tiefenthaler and W. Lukosz, Sensitivity of grating couplers as integrated-optical chemical sensors, J. Opt. Soc. Am. B, 6(1989) 209-220.
4. H. Teichmann, Integrated optical sensors: new developments, in W. Göpel, J. Hesse and N. Zemel (eds.), Sensors, Vol. 8: Micro- and Nanosensor Technology/Trends in Sensor Markets, VCH, Weinheim, Germany, 1995, Ch. 7.
5. R.E. Kunz, G. Duveneck and M. Ehrat, Sensing pads for hybrid and monolithic integrated optical immunosensors, Proc. SPIE, Vol. 2331, 1994, pp. 2-17.
6. D. Freiner, R.E. Kunz, D. Citterio, U.E. Spichiger and M.T. Gale, Integrated optical sensors based on refractometry of ion-selective membranes, Sensors and Actuators B, 29 (1995) 277-285.
7. J. Henkel, A. Brandenburg, P. Klein-Gunnewigk and U. Bilitewski, Multichannel operation of a modified grating coupler, contribution No. S 3.2.3., EUROPTRODE III Conf. Optical Chemical Sensors and Biosensors, Zurich, Switzerland, 31 March-3 April 1996.
8. R.E. Kunz, Gradient effective index waveguide sensors, Sensors and Actuators B, 11 (1993) 167-176.
9. R.E. Kunz and L.U. Kempen, Miniature integrated optical sensors, Proc. SPIE, Vol. 2068, 1994, pp. 69-86.
10. L.U. Kempen and R.E. Kunz, Miniature integrated optical refractometer chip, Proc. SPIE, Vol. 2208, 1994, pp. 124-129.
11. R.E. Kunz, J. Edlinger, B.J. Curtis, M.T. Gale, L.U. Kempen, H. Rudigier and H. Schütz, Grating couplers in tapered waveguides for integrated optical sensing, Proc. SPIE, Vol. 2068, 1994, pp. 313-325.
12. R.E. Kunz, J. Edlinger, P. Sixt and M.T. Gale, Replicated chirped waveguide gratings for optical sensing applications, Sensors and Actuators A, 47(1995) 482-486.
13. R.E. Kunz and J.S. Gu, Design of integrated optical couplers and interferometers suitable for low-cost mass production, Proc. Eur. Conf. Integrated Optics, ECIO '93, Neuchâtel, Switzerland, 1993, pp. 14-36/37.
14. R.G. Heideman, R.P.H. Kooyman and J. Greve, Performance of a highly sensitive optical waveguide Mach-Zehnder interferometer immunosensor, Sensors and Actuators B, 10 (1993) 209-217.
15. J. Ingenhoff, B. Drapp and G. Gauglitz, Biosensors using integrated optical devices, Fresenius' Z. Anal Chem, 346 (1993) 580-583.
16. B. Maisenhölder, H.P. Zappe, R.E. Kunz, P. Riel, M. Moser and J. Edlinger, GaAs/AlGaAs refractometer platform for bio-/chemo-optical sensing applications, Sensors and Actuators B, 38 (1997) in press.
17. L.U. Kempen and R.E. Kunz, Replicated Mach-Zehnder interferometers with focusing grating couplers for sensing applications, Sensors and Actuators B, 38 (1997) in press.
18. R.E. Kunz, J. Dübendorfer and R.H. Morf, Finite grating depth effects for integrated optical sensors with high sensitivity, Biosensors Bioelectron., 11 (1996) 653-667.
19. P. Schieber, J. Straub, J.M.H. Levett Sengers and J.S. Gallagher, Refractive index of water and steam as function of wavelength, temperature and density, J. Phys. Chem. Ref. Data, 19 (1990) 677-717.
20. N. Maythaveekulchai, Etude des coefficients thermorefractifs et photorefractifs de materiaux dielectriques en couches minces, par l'analyse du comportement des lignes de mode obtenues avec le coupler a prisme, Ph.D. Thesis, Ecole Nationale Superieure de Physique de Marseille, 1991.
21. Landolt-Bömstein, Zahlenwerte und Funktionen, NS Vol. 7b, 1975.
22. Data sheet of Heraeus Quartzglas Herasil 1.
23. Data sheet of Rohm Europlex PC 99510.