Study on crystallization of hydrogenated nanocrystalline silicon carbon films

Materials Science and Engineering B

Volumn 41, Issue 3, 1996, Pages 357-361

  Han, Weiqiang ^a   Fan, Shoushan ^a   Gu, Binglin ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Crystallization; Heavily hydrogen dilution; Nanocrystalline; Silicon carbon; Thin films

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; COMPOSITION; CRYSTALLIZATION; FILM GROWTH; GLOW DISCHARGES; HYDROGENATION; NANOSTRUCTURED MATERIALS; PLASMA APPLICATIONS; SILANES; THIN FILMS; VOLUME FRACTION;

ETCHING EFFECT; ETHENE; GAS VOLUME RATIO; HEAVILY HYDROGEN DILUTION; HYDROGENATED NANOCRYSTALLINE SILICON CARBON FILMS; SILICON CARBON;

SEMICONDUCTING FILMS;

EID: 0042263403     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01902-2     Document Type: Article

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