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Applied Physics A: Materials Science and Processing

Volumn 77, Issue 6, 2003, Pages 793-797

Laser hydriding of crystalline and amorphous silicon

(5) Schwickert, M a Carpene, E a Uhrmacher, M a Schaaf, P a Lieb, K P a

a UNIVERSITY OF GÖTTINGEN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTALLINE MATERIALS; CRYSTALLIZATION; EXCIMER LASERS; HYDROGEN; ION BEAMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

CRYSTALLINE SILICON;

AMORPHOUS SILICON;

EID: 0042262783 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-003-2201-x Document Type: Article

Times cited : (8)

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