XTEM investigation of Ge/Pd shallow contact to p-In0.53Ga0.47As

Materials Science and Engineering B

Volumn 40, Issue 1, 1996, Pages 42-49

  Osterle W ^a   Ressel, P ^b  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

^b LEIBNIZ INSTITUT FÜR HÖCHSTFREQUENZTECHNIK   (Germany)

Author keywords

Rapid thermal annealing; Solid state reactions; XTEM investigations

Indexed keywords

AMORPHIZATION; ANNEALING; CHEMICAL MODIFICATION; CHEMICAL REACTIONS; DIFFRACTION; GERMANIUM; INTERFACES (MATERIALS); PALLADIUM; SEMICONDUCTING INDIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY SPECTROSCOPY;

CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; FOCUSED BEAM MICRODIFFRACTION; SOLID STATE REACTIONS;

OHMIC CONTACTS;

EID: 0042262426     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5107(96)01580-2     Document Type: Article

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