Characteristics of 10 mm multilayer L1-F2 mode vibrator and application to a linear motor

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 5 B, 2003, Pages 3002-3006

  Funakubo, Tomoki ^a,b   Tomikawa, Yoshiro ^b  

^a OLYMPUS CORPORATION   (Japan)

^b YAMAGATA UNIVERSITY   (Japan)

Author keywords

Low voltage drive; Multilayer L1 F2 mode vibrator; Multilayer vibrator; Small size; Ultrasonic linear motor; Ultrasonic motor; Ultrasonic vibrator

Indexed keywords

ELECTRODES; PERFORMANCE; ULTRASONIC EQUIPMENT; VELOCITY MEASUREMENT; VIBRATIONS (MECHANICAL); VIBRATORS; VOLTAGE MEASUREMENT;

LOW VOLTAGE DRIVE; MULTILAYER VIBRATOR; ULTRASONIC MOTOR; ULTRASONIC VIBRATOR;

LINEAR MOTORS;

EID: 0042243624     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.3002     Document Type: Article

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