Zone-plate interferometer to measure the positioning error of a cutting tool

Precision Engineering

Volumn 20, Issue 2, 1997, Pages 112-116

  Nomura, Takashi ^a,c   Kamiya, Kazuhide ^a   Miyashiro, Hiroshi ^a   Tashiro, Hatsuzo ^b   Yoshikawa, Kazuo ^b  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

^b UNIVERSITY OF TOYAMA   (Japan)

^c Dept of Mech Systems Engineering ^*  (Japan)

Author keywords

Computer generated hologram; Cutting tool; On machine measurement; Positioning error; Shape measurement; Spherical mirrors; Zone plate interferometer

Indexed keywords

COMPUTER SIMULATION; HOLOGRAMS; LATHES; MACHINE VIBRATIONS; MIRRORS; SURFACE TESTING; TURBULENCE;

FIZEAU INTERFEROMETER; POSITIONING ERRORS; SHAPE MEASUREMENT; ZONE PLATE INTERFEROMETERS;

INTERFEROMETERS;

EID: 0042228949     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0141-6359(97)81197-x     Document Type: Article

References (3)

1. Nomura, T., Miyashiro, H., Kamiya, K., Yoshikawa, K., Tashiro, H., Suzuki, M. and Kobayashi, F. "Shape measurement of workpiece surface with zone-plate interferometer during machine running," Prec Eng, 1993, 15, 86-92
2. Smartt, R. N. "Zone plates interferometer," Appl Optics, 1974, 13, 1093-1099
3. Nomura, T., Kamiya, K., Miyashiro, H., Yoshikawa, K., Tashiro, H., Suzuki, M., Ozono, S., Kobayashi, F. and Usuki, M. "An instrument for manufacturing zone-plates by using a lathe," Prec Eng, 1994, 16, 290-295