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Journal of Applied Physics
Volumn 62, Issue 9, 1987, Pages 3682-3687
Nuclear reaction analysis of shallow B and BF2 implants in Si
(3)
Ridgway, M C
a
Scanlon, P J
a
Whitton, J L
a
a
QUEEN S UNIVERSITY
(
Canada
)
Author keywords
[No Author keywords available]
Indexed keywords
EID
:
0042082475
PISSN
:
00218979
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1063/1.339249
Document Type
:
Article
Times cited : (
15
)
References (
27
)
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