In situ high-resolution transmission electron microscopy of direct bonding processes between silicon tips with oxide surfaces at room temperature

Applied Physics Letters

Volumn 75, Issue 18, 1999, Pages 2743-2745

  Kizuka, Tokushi ^a,b   Hosoki, Kazue ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042078249     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125135     Document Type: Article

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