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Volumn 19, Issue 10, 2002, Pages 2043-2052

Experimental light-scattering measurements from large-scale composite randomly rough surfaces

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; LIGHT MEASUREMENT; LIGHT POLARIZATION; LITHOGRAPHY; SURFACE ROUGHNESS;

EID: 0042072977     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.19.002043     Document Type: Article
Times cited : (16)

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