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Volumn 12, Issue 2, 2002, Pages 551-562
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Numerical analysis of random dopant-induced effects in semiconductor devices
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Author keywords
Doping fluctuations; MOSFETs; Small signal parameters variance; Threshold voltage variances
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Indexed keywords
DIFFUSION;
FREQUENCY RESPONSE;
ION IMPLANTATION;
MICROPROCESSOR CHIPS;
NUMERICAL ANALYSIS;
OXIDES;
SEMICONDUCTOR DOPING;
STATISTICAL METHODS;
THRESHOLD VOLTAGE;
DOPING FLUCTUATIONS;
SMALL SIGNAL PARAMETERS VARIANCE;
THRESHOLD VOLTAGE VARIANCES;
MOSFET DEVICES;
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EID: 0042067124
PISSN: 01291564
EISSN: None
Source Type: Journal
DOI: 10.1142/S0129156402001204 Document Type: Conference Paper |
Times cited : (5)
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References (11)
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