High-resolution position encoder, insensitive to misalignment

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2783, Issue , 1996, Pages 184-191

  Engelhardt, Kai ^a   Seitz, Peter ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT; FITS AND TOLERANCES; MICROSYSTEMS; OPTICAL INSTRUMENTS;

ANGULAR MISALIGNMENT; DETECTION SYSTEM; INCREMENTAL ENCODER; INTERPOLATION ERROR; MECHANICAL ALIGNMENT; PHOTO DETECTOR ARRAY; POSITION ENCODERS; PRECISION MACHINE TOOLS;

SIGNAL ENCODING;

EID: 0042054084     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.248487     Document Type: Conference Paper

References (4)

1. A. R. Luxmoore and A. T. Shepherd, Chap. 3 "Applications of the Moire effect", Optical Transducers and Techniques in Engineering Measurement, ed. A. R. Luxmoore, pp. 61-108, Applied Science Publishers Ltd., London, 1983.
2. K. Engelhardt and P. Seitz, "Absolute, high-resolution optical position encoder", Appl. Opt. Vol. 35, No. 1, pp. 201-208, Jan. 1996.
3. Orbit Semiconductor Inc., 1230 Bordeaux Drive, Sunnyvale, CA 94089, USA.
4. LCS250-5 OEM Laser Interferometer, Intop Precision Engineering, D-88699 Frickingen, Germany.