Measurement of the pressure response of boron-doped CVD diamond piezoresistors as a function of resistivity and electric field

Sensors and Actuators, A: Physical

Volumn 69, Issue 1, 1998, Pages 27-32

  Sahli, Sondes ^a   Aslam, D M ^a,b  

^a Michigan State University   (United States)

^b WAYNE STATE UNIVERSITY   (United States)

Author keywords

Boron; Chemical vapor deposition; Diamond; Piezoresistors

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRIC FIELDS; PIEZOELECTRIC MATERIALS; PRESSURE; PRESSURE MEASUREMENT; SENSORS;

DIFFERENTIAL PRESSURE SENSOR; GAUGE FACTOR; PIEZORESISTOR;

DIAMONDS;

EID: 0042045109     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01744-5     Document Type: Article

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