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Volumn 14, Issue 1-3 SPEC. ISS., 1996, Pages 105-107
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Properties of multilayer and alloyed PVD films on the base of TiN
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0042037694
PISSN: 02634368
EISSN: None
Source Type: Journal
DOI: 10.1016/0263-4368(96)83423-8 Document Type: Article |
Times cited : (10)
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References (7)
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