Fracture mechanics tests for measuring the adhesion of magnetron sputtered TiN coatings

International Journal of Refractory Metals and Hard Materials

Volumn 14, Issue 1-3 SPEC. ISS., 1996, Pages 207-211

  Muller D ^a   Cho, Y R ^a   Berg, S ^a   Fromm, E ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042037692     PISSN: 02634368     EISSN: None     Source Type: Journal    
DOI: 10.1016/0263-4368(96)83436-6     Document Type: Article

References (11)

1. Perry, A. J., Scratch adhesion testing of hard coatings. Thin Solid Films, 107 (1983) 167-80.
2. Tsukamoto, Y., Kuroda, H., Sato, A. & Yamaguchi, H., Microindentation adhesion tester and its application to thin films. Thin Solid Films, 213 (1992) 220-25.
3. Steinmann, P. A., Tardy, Y. & Hintermann, H. E., Adhesion testing by the scratch test method: the influence of intrinsic and extrinsic parameters on the critical load. Thin Solid Films, 154 (1987) 333-49.
4. Je, J. H., Gyarmati, E. & Naoumidis, A., Scratch adhesion test of reactively sputtered TiN coatings on a soft substrate. Thin Solid Films, 136 (1986) 57-67.
5. Bascom, W. D., Becher, P. F., Bitner, J. T. & Murday, J. S., Adhesion Measurement of Thin Films. In Thick Films and Bulkcoatings, ed. K. L. Mittal, ASTM Special Technical Publication 640, American Society for Testing and Materials, Philadelphia, 1978, pp. 67-78.
6. Filiaggi, M. J. & Pilliar, R. M., Mechanical testing of plasma-sprayed ceramic coatings on metal substrates: interfacial fracture toughness and tensile bond strength. J. Mat. Sci., 26 (1991) 5383-95.
7. Suga, T. & Elssner, G., Z. Werkstoff. 16 (1985) 75.
8. Elssner, G., Suga, T. & Turwitt, M., Fracture of ceramic-to-metal interfaces. J. Phys. (Paris) Colloq. Ch. 4, 46 (1985) 597-612.
9. Jayatilaka, A. de S., Fracture Engineering Brittle Materials, Applied Science Publishers, London, 1979.
10. Berg, S., Kim, S. W., Grajewski, V. & Fromm, E., Effect of contamination on mechanical properties and adhesion of magnetron-sputtered TiN coatings on high speed steel substrates. Mat. Sci. Eng., A139 (1991) 345-51.
11. Berg, S., Eguchi, S., Grajewski, V., Kim, S. W. & Fromm, E., Effect of contamination on composition and mechanical properties of magnetron-sputtered TiN coatings. Surf. Coat. Technol., 49 (1991) 336-42.