Sputter deposition conditions and penetration depth in NbN thin films

IEEE Transactions on Applied Superconductivity

Volumn 13, Issue 2 III, 2003, Pages 3288-3291

  Hu, Roger ^a   Kerber, George L ^a   Luine, Jerome ^a   Ladizinsky, Eric ^a   Bulman, John ^b  

^a NORTHROP GRUMMAN CORPORATION   (United States)

^b LOYOLA MARYMOUNT UNIVERSITY   (United States)

Author keywords

NbN; Penetration depth; TiN

Indexed keywords

ELECTRIC RESISTANCE; NIOBIUM COMPOUNDS; OXIDATION; RESONATORS; SPUTTER DEPOSITION; SQUIDS; SUPERCONDUCTING TRANSITION TEMPERATURE;

PENETRATION DEPTH;

THIN FILMS;

EID: 0041974873     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2003.812227     Document Type: Conference Paper

References (7)

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