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Volumn 42, Issue 13, 2003, Pages 2415-2421

W/SiC x–ray multilayers optimized for use above 100 keV

Author keywords

[No Author keywords available]

Indexed keywords

REFLECTIVE COATINGS; SILICON CARBIDE; SYNCHROTRON RADIATION; TUNGSTEN; X RAYS;

EID: 0041971523     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.002415     Document Type: Article
Times cited : (45)

References (18)
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    • (1989) J. Appl. Phys. , vol.65 , pp. 491-506
    • Stearns, D.G.1
  • 8
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    • Broadband focusing of hard X-rays using a supermirror
    • of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C
    • P. Hoghoj, E. Ziegler, J. Susini, A. Freund, K. D. Joensen, and P. Gorenstein, “Broadband focusing of hard X-rays using a supermirror,” in Physics of X-Ray Multilayer Structures, Vol. 6 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), pp. 142-145.
    • (1994) Physics of X-Ray Multilayer Structures , vol.6 , pp. 142-145
    • Hoghoj, P.1    Ziegler, E.2    Susini, J.3    Freund, A.4    Joensen, K.D.5    Gorenstein, P.6
  • 11
    • 0037115187 scopus 로고    scopus 로고
    • Normal-incidence reflectance of optimized W/B4C x-ray multilayers in the range 1.4 nm < A < 2.4 nm
    • D. L. Windt, E. M. Gullikson, and C. C. Walton, ‘Normal-incidence reflectance of optimized W/B4C x-ray multilayers in the range 1.4 nm < A < 2.4 nm,” Opt. Lett. 27, 2212-2214 (2002).
    • (2002) Opt. Lett. , vol.27 , pp. 2212-2214
    • Windt, D.L.1    Gullikson, E.M.2    Walton, C.C.3
  • 12
    • 0001070396 scopus 로고
    • Multilayer facilities required for extreme-ultraviolet lithography
    • D. L. Windt and W. K. Waskiewicz, “Multilayer facilities required for extreme-ultraviolet lithography,” J. Vac. Sci. Tech-nol. B 12, 3826-3832 (1994).
    • (1994) J. Vac. Sci. Tech-Nol. B , vol.12 , pp. 3826-3832
    • Windt, D.L.1    Waskiewicz, W.K.2
  • 13
    • 0001634592 scopus 로고    scopus 로고
    • IMD—software for modeling the optical properties of multilayer films
    • D. L. Windt, “IMD—software for modeling the optical properties of multilayer films,” Comput. Phys. 12, 360-370 (1998).
    • (1998) Comput. Phys. , vol.12 , pp. 360-370
    • Windt, D.L.1
  • 14
    • 85010183411 scopus 로고    scopus 로고
    • High-energy atomic scattering factors are available at http:// www-phys.llnl.gov/Research/scattering/asf.html.
  • 15
    • 85010137661 scopus 로고    scopus 로고
    • High-energy mass absorption coefficients are available for elements at http://physics.nist.gov/PhysRefData/XrayMassCoef/ cover.html.
  • 16
    • 0004932883 scopus 로고
    • X-ray interactions: Photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92
    • B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181-342 (1993).
    • (1993) At. Data Nucl. Data Tables , vol.54 , pp. 181-342
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  • 17
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    • Surface finish requirements for soft x-ray mirrors
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    • (1994) Appl. Opt. , vol.33 , pp. 2025-2031
    • Windt, D.L.1    Waskiewicz, W.K.2    Griffith, J.E.3
  • 18
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    • The optical constants that we derived here will be included with the next release of IMD, available at
    • The optical constants that we derived here will be included with the next release of IMD, available at http://cletus.phys. columbia.edu/windt/imd.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.