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Microsystem Technologies
Volumn 7, Issue 4, 2001, Pages 151-154
Dicing challenges in microelectronics and micro electro-mechanical systems (MEMS)
Author keywords

[No Author keywords available]
Indexed keywords

EID: 0041902161     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420000077     Document Type: Article
Times cited : (10)
References (5)
  • 1
    • 0030141493 scopus 로고    scopus 로고
    • Precision machining of rigid disk head sliders
    • Gatzen HH; Maetzig JC; Schwabe MK (1996) Precision machining of rigid disk head sliders, IEEE Trans. Magn. 32 (3): 1843-1849
    • (1996) IEEE Trans. Magn. , vol.32 , Issue.3 , pp. 1843-1849
    • Gatzen, H.H.1    Maetzig, J.C.2    Schwabe, M.K.3
  • 2
    • 0043088466 scopus 로고    scopus 로고
    • Mikrobearbeitung sprödharter keramikwerkstoffe mittels trenn-und profilschleifen
    • Vulkan, Essen, Germany 2000
    • Gatzen HH (2000) Mikrobearbeitung sprödharter Keramikwerkstoffe mittels Trenn-und Profilschleifen (Mechanical Micromachining of Brittle Ceramics by Means of Slicing and Profiling). Schleifen, Honen, Läppen und Polieren, 59th Edn, Vulkan, Essen, Germany 2000, pp. 190-204
    • (2000) Schleifen, Honen, Läppen und Polieren, 59th Edn , pp. 190-204
    • Gatzen, H.H.1
  • 3
    • 0041585708 scopus 로고    scopus 로고
    • Dicing of silicon wafers
    • Berlin, April 17-19, 2000
    • Inasaki I (2000) Dicing of Silicon Wafers. Proc. MicroMat 2000, Berlin, April 17-19, 2000
    • (2000) Proc. MicroMat 2000
    • Inasaki, I.1
  • 4
    • 0031361459 scopus 로고    scopus 로고
    • Technological advances in fine abrasive processes
    • 1997
    • Komandori R; Lucca DA; Tani Y (1997) Technological Advances in Fine Abrasive Processes, Ann CIRP, 46/2: 1997, pp. 545-596
    • (1997) Ann CIRP , vol.46 , Issue.2 , pp. 545-596
    • Komandori, R.1    Lucca, D.A.2    Tani, Y.3
  • 5
    • 0017555307 scopus 로고
    • A model for crack initiation in elastic/plastic indentation fields
    • Lawn BR; Evans AG (1977) A Model for Crack Initiation in Elastic/Plastic Indentation Fields. J Mat Sci 12:2195-2199
    • (1977) J Mat Sci , vol.12 , pp. 2195-2199
    • Lawn, B.R.1    Evans, A.G.2

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.