Sustainable treatment of HF wastewaters from semiconductor industry with a fluidized bed reactor

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 3, 2003, Pages 423-428

  Van den Broeck, Kristel ^a   Van Hoornick, Nausikaä ^a   Van Hoeymissen, Jan ^a   De Boer, Robert ^b   Giesen, Andreas ^b   Wilms, Dirk ^c  

^a IMEC   (Belgium)

^b ROYAL HASKONINGDHV   (Netherlands)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Calcite; Calcium fluoride; Environment; ESH; Fluidized bed reactor; Fluorite; Hydrogenfluoride; Sustainable waste water treatment

Indexed keywords

CALCITE; CRYSTALLIZATION; FLUIDIZED BEDS; FLUORINE COMPOUNDS; FLUORSPAR; GRANULAR MATERIALS; SAND; SUPERSATURATION; WASTEWATER TREATMENT;

CALCIUM FLUORIDE; FLUIDIZED BED REACTORS; HYDROGEN FLUORIDE; SEMICONDUCTOR INDUSTRY; SUSTAINABLE WASTEWATER TREATMENT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0041885513     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.815624     Document Type: Article

References (4)

1. A. Toyoda and T. Taira, "A new method for treating fluorine wastewater to reduce sludge and running costs," IEEE Trans. Semiconduct. Manufact., vol. 13, pp. 305-309, Aug. 2000.
2. H. Kurosaki, "Reduction of fluorine-containing industrial waste using aluminum-solubility method," Special Issue Global Environment, Oki Technical Rev., vol. 63, pp. 53-56, Jan. 1998.
3. M. Yang, T. Hashimoto, N. Hoshi, and H. Myoga, "Fluoride removal in a fixed bed packed with granular calcite," Wat. Res., vol. 33, no. 16, pp. 3395-3402, 1999.
4. E. Reardon and Y. Yang, "A limestone reactor for fluoride removal from wastewaters," Environm. Sci. Technol., vol. 34, pp. 3247-3253, 2000.