Impedance characteristics of an rf parallel plate discharge and the validity of a simple circuit model

Journal of Applied Physics

Volumn 62, Issue 12, 1987, Pages 4688-4695

  Bletzinger, P ^a   Flemming, Mark J ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041848725     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.339019     Document Type: Article

References (0)