Manufacturability and reliability of trimmed buried resistors in LTCC

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5231, Issue , 2003, Pages 183-188

  Ehrhardt, Waleed ^a   Thust, Heiko ^a   Müller, Jens ^b  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b MSE Micro Systems Engineering GmbH & Co   (Germany)

Author keywords

Buried resistors; Integrated passives; LTCC; Trimming

Indexed keywords

CURING; FIRING (OF MATERIALS); MIXING; RELIABILITY; RESISTORS; SINTERING; THERMAL CYCLING; TRIMMING;

BURIED RESISTORS; INTEGRATED PASSIVES; LOW TEMPERATURE COFIRED CERAMIC;

CERAMIC MATERIALS;

EID: 0041828741     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. J. Mueller, H. Thust and B. Sjöling: Trimming of buried resistors in LTCC-Circuits, Proceeding of the ISHM Nordic, Helsingoer, DK, 22.-24. Sept. 1996.
2. H. Thust, K.-H. Drüe and T. Thelemann: Trimming Arrangement of Buried Resistors in LTCC, Proc. Of 36th IMAPS Nordic Annual Conf. Helsinki, 1999, pp 150-157.
3. W. Ehrhardt, H. Thust: Trimming of Thick-Film-Resistors by Energy of High Voltage Pulses, Proc. Of 13th European Microelectronics and Packaging Conference & Exhibition in Strasbourg, 2001, pp 403-407.
4. W. Ehrhardt, H. Thust: Trimming of buried Thick Film Resistors by Energy of HV Pulses, Proc. Of 38th IMAPS Nordic Conference in Oslo, 2001, pp 316-321.
5. 2 Thick Film Resistors, in IEEE Trans. on Comp., Hybrid, and Man. Tech. Vol. 14 No. 2 June 1991.
6. 2 Thick Film Resistors and Influence of Glass Particles Size on Their Electrical Properties, IEEE Trans. Vol. CHMT-7, No. 2, June 1984.
7. G. E. Pike and C. H. Seager: Electrical Properties and Conduction mechanism of Ru-based thick film resistors, J. Appl. Phys. 48 (12), December 1977.